The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 1994
Filed:
Nov. 16, 1992
Applicant:
Inventors:
Martin Heming, Saulheim, DE;
Roland Hochhaus, Mainz, DE;
Jurgen Otto, Mainz, DE;
Volker Paquet, Mainz, DE;
Assignee:
Schott Glaswerke, Mainz, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ; B05D / ;
U.S. Cl.
CPC ...
385142 ; 427576 ; 427575 ; 427569 ; 427534 ; 427535 ; 427539 ; 427166 ; 427165 ; 427309 ;
Abstract
A process is disclosed for the production of an optical thin film waveguide of TiO.sub.2 with an attenuation of <5 dB/cm on a planar inorganic substrate wherein the thin film waveguide is produced by a microwave plasma CVD process (PCVD).