The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 08, 1994

Filed:

Dec. 05, 1990
Applicant:
Inventors:

Anita M Flynn, Arlington, MA (US);

Lee S Tavrow, Somerville, MA (US);

Rodney A Brooks, Lincoln, MA (US);

Leslie E Cross, State College, PA (US);

Stephen F Bart, Watertown, MA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
310323 ; 310328 ; 29 2535 ;
Abstract

A ferroelectric motor comprises a single layer of ferroelectric material electrically excited by an array of electrical contacts and an electrical excitation source for supplying phased electrical signals to the contacts thereby creating a travelling wave of mechanical deformation in the ferroelectric layer and actuating an actuator. In alternative embodiments of the invention, the actuator may be linear or rotary. The motor may be fabricated on a single integrated circuit die, in which case the layer of ferroelectric material may be a thin film of PZT. In other embodiments a motor may comprise two dies which are sandwiched together by wafer to wafer bonding. Portions of a die may be removed to permit a linear actuator to project beyond the die.


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