The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 1994
Filed:
May. 10, 1993
Applicant:
Inventors:
Mitsuhiko Nagata, Fujisawa, JP;
Shoji Kamiunten, Chigasaki, JP;
Takashi Kurosawa, Chigasaki, JP;
Tomoshige Yamamoto, Sagamihara, JP;
Assignee:
Yamatake-Honeywell Co., Ltd., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F / ;
U.S. Cl.
CPC ...
7320426 ; 7320411 ;
Abstract
A diaphragm-type sensor is disclosed which comprises a substrate including a cavity, a diaphragm formed on the cavity and supported by the substrate, a heater element arranged on the diaphragm, two sensor elements arranged on both sides of the heater means and slits between the heater means and the respective sensor means. The slits are effective in completely preventing the deformation of the diaphragm due to a heat propagated from the heater element, from influencing the sensor elements, whereby the diaphragm-type sensor exhibits stable output characteristics.