The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 1994
Filed:
Aug. 09, 1991
Applicant:
Inventor:
Lawrence J Knipp, Fort Collins, CO (US);
Assignee:
Advanced Energy Industries, Inc., Fort Collins, CO (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
21912157 ; 31511121 ; 20429808 ; 31323131 ;
Abstract
A system for igniting a plasma in thin film processing is shown whereby matching network impedances are varied to effect voltage changes. Shunt and series capacitors vary around a limited range so as to achieve substantially all possibilities. A programmed routine of varying in phase, out of phase, and 90.degree. apart in phase is accomplished with a range +/-10% of full variation around some prior value likely to support ignition.