The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 1994
Filed:
Sep. 04, 1992
Masato Toshima, Sunnyvale, CA (US);
Jerry Wong, Fremont, CA (US);
MTM Engineering, Inc., Santa Clara, CA (US);
Abstract
Method for determining temperature ranges at which a selected gas evolves from a specimen of a selected material, bulk or surface of a metal, semiconductor, or insulator, and the probable source of that gas in each such temperature range. A specimen is placed in an evacuated and baked-out tube, and the specimen temperature T is increased according to a selected time-dependent temperature pattern over a temperature range. As temperature T(t) increases, pressure p(t) of any gas evolving in the tube is measured for a sequence of times t. A total pressure derivative, dp/dT=(dp/dt)(dT/dt).sup.-1, is determined, identifying one or more peak temperatures, each having a peak temperature range corresponding to specimen emission of at least one gas by breaking a bond containing an atom or molecule of that emitted gas. Partial pressure rises in the tube at each peak temperature are monitored and converted to an equivalent gas concentration. In a second embodiment, two tubes, with only one containing a specimen, are used for analyzing the differential pressure .DELTA.p=p1- p2 and differential pressure derivative d(.DELTA.p)/dT. In a third embodiment, both tubes contain specimens, and one or more peak temperatures are identified. In each embodiment, composition, partial pressures and concentrations of gases evolved at a peak temperature are optionally determined by residual gas analysis of another specimen in another tube, heated to and held at a peak temperature.