The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 1994
Filed:
Jan. 25, 1993
Kazuo Yokoyama, Hirakata, JP;
Motoshi Shibata, Hirakata, JP;
Matsushita Electric Industrial Co., Ltd., Kadoma, JP;
Abstract
Disclosed is a positioning device comprising an X-Y scanning mechanism capable of scanning and driving in planar directions and a Z-scanning mechanism capable of scanning and driving in a direction perpendicular to the planar directions. A sample table is affixed to the moving part of the Z-scanning mechanism, and the housing of the probe head is fixed to the casing of the positioning device through a plate spring. The housing abuts against a plane formed in the moving part of the X-Y scanning mechanism through three point contact legs such that the resonance frequency of the entire device can be set high, thereby realizing a high anti-vibration effect and stable probe scanning. The housing of the probe head abuts against said plane formed in the moving part of the X-Y scanning mechanism through three ball bearings composing the three point contact legs, and is mounted on the fixed table through a thin plate spring.