The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 1994
Filed:
Aug. 03, 1992
Applicant:
Inventors:
Thomas Krug, Rodenbach, DE;
Klemens Ruebsam, Jossgrund, DE;
Andreas Meier, Pfullingen, DE;
Gerhard Steiniger, Ronneburg, DE;
Mitsuru Kano, Tokyo, JP;
Noboru Sasaki, Sugito, JP;
Takashi Miyamoto, Sugito, JP;
Mamoru Sekiguchi, Kawaguchi, JP;
Assignees:
Leybold Aktiengesellschaft, Hanau, DE;
Toppan Printing Company, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
427536 ; 427537 ; 427539 ; 118719 ; 1187 / ;
Abstract
The invention relates to a method for the aftertreatment of an oxide coating, and specifically an SiO.sub.x coating on a synthetic film. In this aftertreatment the oxide coating is exposed to a plasma whose particles effect positive changes of the oxide coating.