The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 1994
Filed:
Aug. 12, 1991
Applicant:
Inventors:
Raul Fainchtein, Rockville, MD (US);
Paul R Zarriello, Catonsville, MD (US);
Assignee:
The Johns Hopkins University, Baltimore, MD (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25F / ; C25F / ;
U.S. Cl.
CPC ...
20412955 ; 20412975 ; 20412995 ; 2042 / ; 204225 ; 204228 ;
Abstract
The invention is a process for making sharp tips. A computer controlled instrument and process characterizes the tip while in formation and reliably produces tips having a radius of curvature of approximately 100 nm. In the invention, the position of the wire during the etching operation is mechanically controlled while the etching current is monitored. When the current reaches a predetermined level, the process is halted.