The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 1994
Filed:
Nov. 12, 1992
Applicant:
Inventor:
Kaoru Hama, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437160 ; 437 37 ; 437938 ;
Abstract
According to this invention, an oxide film is formed on a semiconductor substrate, a metallic boron film or a film containing at least one selected from the group consisting of boron, phosphorus, and arsenic is deposited on the surface of the resultant structure. At least one selected from the group consisting of boron, phosphorus, and arsenic is doped from the metallic boron film or the film containing at least one selected from the group consisting of boron, phosphorus, and arsenic to the oxide film by diffusion without diffusing into the semiconductor substrate. Thus, a semiconductor device having good radiation resistance can be obtained.