The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 1994
Filed:
Apr. 02, 1992
Barrett E Cole, Bloomington, MN (US);
Khanh Q Nguyen, Bloomington, MN (US);
Ulrich Bonne, Minnetonka, MN (US);
Gas Research Institute, Chicago, IL (US);
Abstract
A rugged O.sub.2 microsensor constructed from Si, and Pt, Si.sub.3 N.sub.4 and ZrO.sub.2 thin films which is free standing and isolated from the silicon substrate in combination with a counter electrode and a heater in a bow-tie configuration. The sensor combines an integral heater made from platinum which is deposited on a silicon wafer as a thin film. The thin film heater heats a small yttria-stabilized zirconia sensor that sends a signal proportional to the amount of oxygen in the ambient environment through a counter electrode. The sensor and heater are supported on the silicon wafer by a thin layer of silicon nitride.