The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 25, 1994

Filed:

Jun. 03, 1992
Applicant:
Inventors:

Nagesh R Basavanhally, Trenton, NJ (US);

Kenneth H Billingham, Feasterville, PA (US);

Assignee:

AT&T Bell Laboratories, Murray Hill, NJ (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
310328 ; 310331 ; 385137 ; 356350 ;
Abstract

An adjustable X-Y stage (10) comprises a single monolithic member from which regions have been cut to define a central mounting portion (19), a peripheral frame portion (20) a plurality of moveable portions (21), each located between the central mounting portion and the peripheral frame portion, a plurality of first spring portions (22), each interconnecting one of the moveable portions to the central mounting portion, and a plurality of second spring portions (23), each being adjacent a moveable portion and each interconnecting the peripheral frame portion to the central mounting portion. A plurality of screws (12-15), each adapted to extend through the peripheral frame portion (20), engages one of the moveable portions (21) to permit adjustments of the central mounting portion (19) in transverse X and Y directions.


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