The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 1994
Filed:
Mar. 16, 1992
Applicant:
Inventors:
Andreas Th Engelen, Eindhoven, NL;
Peter E Asselbergs, Eindhoven, NL;
Johannes A Cooijmans, Eindhoven, NL;
Assignee:
U.S. Philips Corporation, New York, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
25044011 ; 25044211 ;
Abstract
A specimen holder for use in a charged particle beam device, notably an electron microscope, comprises a support and a resilient retaining element. The retaining element comprises a resilient ring which can be detached from the support or resilient tags which are attached to the support. A specimen is pressed against the support by the resilient retaining element. Such retaining of the specimen offers the advantage that the specimen can be readily disposed on the comparatively thin support and can be simply detached therefrom with a minimum risk of damaging.