The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 1994
Filed:
Apr. 30, 1991
Applicant:
Inventors:
Mineo Nishi, Kitakyushu, JP;
Koji Nakano, Kitakyushu, JP;
Tadashi Kusumoto, Kitakyushu, JP;
Keisuke Nakano, Kitakyushu, JP;
Yoshihiro Takada, Kitakyushu, JP;
Assignee:
Mitsubishi Kasei Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F / ; G03F / ;
U.S. Cl.
CPC ...
430190 ; 430191 ; 430192 ; 430193 ; 430165 ; 430326 ;
Abstract
A photoresist composition useful for the preparation of semiconductors and to be irradiated by light with a wavelength of from 330 to 450 nm, which comprises (1) an alkali-soluble resin, (2) a quinone-diazide type photosensitive compound and (3) a solvent, wherein