The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 1994
Filed:
Dec. 26, 1991
Russell B Rauch, Pasadena, CA (US);
Chuong V Tran, Lawndale, CA (US);
Xerox Corporation, Stamford, CT (US);
Abstract
A compact dual sputtering device which has two adjacent sputtering sections within a housing. The sputtering sections are arranged along a common axis with each section having a ring magnet circumscribed around the axis and a pole magnet, the center of which generally extends along the axis. The ring magnets are axially spaced from each other and the pole magnets are axially spaced from each other with each pole magnet being surrounded by a respective one of the ring magnets leaving a generally annular space between each of the pole magnets and a respective one of the ring magnets. Each section has a target area located on the outer surface of the housing at opposite axial ends of the housing. The housing has fluid inlet means and fluid outlet means and passage means connecting the annular space of one sputtering section with the annular space of the other sputtering section. The fluid inlet means opens into the passage means upstream of fluid flow and the fluid outlet means opens into the passage means downstream of fluid flow so fluid enters the housing through the inlet means and circulates through the passage means and the annular spaces and out of the housing through the outlet means.