The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 1994
Filed:
May. 20, 1992
Shin-ichi Hirano, Nagoya, JP;
NGK Spark Plug Co., Ltd., Aichi, JP;
Abstract
The invention provides a method of preparing .beta.-BaB.sub.2 O.sub.4 thin film. The beta barium boron thin film obtained does not contain impurities but has homogeneous structure, thus being applicable to various industrial fields including integrated circuits. The method of the invention includes the steps of melting and mixing boron alkoxide and metal barium or barium alkoxide in the presence of a solvent to prepare a homogeneous solution, covering a substrate with a thin film of the homogeneous solution or concentrated homogeneous solution, and firing the thin film in an atmosphere containing oxygen in a temperature range higher than 400.degree. C. and lower than 900.degree. C.