The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 1994
Filed:
Oct. 15, 1991
Satiko Okazaki, Tokyo, JP;
Masuhiro Kogoma, Saitama, JP;
Research Development Corporation of Japan, Tokyo, JP;
Abstract
The apparatus of the present invention comprises a reaction vessel, and disposed within this vessel, a pair of opposed electrodes. The opposed electrodes comprise an upper electrode and a lower electrode which are spaced apart a suitable distance for receiving the substrate. The lower electrode has an upper surface covered with a solid dielectric. The upper electrode may have its lower surface covered with a solid dielectric, or it may be composed of a plurality of fine wires. Near the spaced apart electrodes are a plurality of gas outlets for uniformly dispersing the reaction gas between the spaced apart electrodes. The method of the present invention comprises introducing a reagent gas or a mixture of a reagent gas and a rare gas or an inert gas into the reaction vessel, exciting the gas to produce a glow discharge plasma under atmospheric pressure, and treating the surface of the substrate with the plasma.