The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 1993
Filed:
Jan. 30, 1992
Rolf Becker, Reutlingen, DE;
Klaus Jaeckel, Reutlingen, DE;
Jiri Marek, Reutlingen, DE;
Frank Bantien, Ditzingen, DE;
Helmut Baumann, Gomaringen, DE;
Kurt Weiblen, Metzingen, DE;
Martin Willmann, Reutlingen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A method is proposed for assembling micromechanical sensors, in particular Hall sensors, or pressure or acceleration sensors, in which at least one silicon sensor element is applied to a substrate. The at least one silicon sensor element is joined to the substrate via at least one assembly pedestal, the cap faces of which are kept small compared with the surface of the silicon sensor element, so that a gap exists between the substrate and the silicon sensor element except for the region of the at least one assembly pedestal.