Method for low pressure rinsing and drying in a process chamber

Abstract

An embodiment of the present invention is a system for rinsing and drying items comprising a process chamber for receiving the items; a rinse condenser; a first heater; a vaporizer for vaporizing water and including a second heater; a vacuum system for reducing the pressure within the process chamber; and a valving apparatus for independently coupling the process chamber to the vaporizer and the process chamber to the vacuum system. A controller sequences the first and second heaters and the valving apparatus such that the pressure within the process chamber is substantially reduced below atmospheric pressure, the rinse condenser is turned on, water is introduced to the vaporizer which is turned to water vapor by turning the second heater on, the water vapor is circulated to the process chamber, the water vapor is condensed on the items and the rinse condenser, the condensate water is allowed to rain on the items, the water condensate is returned from the process chamber to the vaporizer, the process chamber is isolated from the vaporizer, the rinse condenser is turned off, the first heater is turned on, the vacuum system operates to remove water vapor from the process chamber, and atmospheric pressure is restored to the process chamber when the items are dry of water.