The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 1993
Filed:
Sep. 11, 1992
Jiro Mizuno, Fujisawa, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A guide apparatus for vertical movement of a stage supports a stage supporting member for supporting the stage vertically movable by means of two groups of guide mechanism. Each of the guide mechanism groups is separately mountable with respect to the stage supporting member and is fixed to sandwich the stage supporting member from the left and right side. For one of the guide mechanisms, a highly rigid guide member machined with a high precision is used while a for the other guide mechanism, a guide member having a low rigidity as compared with the foregoing highly rigid guide member is used. One of the guide mechanisms is arranged so that its mounting position can be adjusted to match with the other guide mechanism. The mounting position of one of the guide mechanism is made higher than that of the other guide mechanism. The light path of the beam from a light source is provided lower than the mounting position of the foregoing one of the guide mechanisms.