The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 1993
Filed:
May. 28, 1992
Applicant:
Inventor:
Robert D Kos, Victoria, MN (US);
Assignee:
Fluoroware, Inc., Chaska, MN (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C / ;
U.S. Cl.
CPC ...
118500 ; 206334 ; 269903 ; 211 41 ; 118428 ;
Abstract
A process platform for wafer carriers having a floor and a handle extending upwardly from the floor to define two floor portions for engaging wafer carriers on either side of the handle. The floor portions feature structures for orienting the wafer carriers either parallel or perpendicular to the handle and a peripheral gridwork of openings to permit fluid to flow easily through the floor to the wafer carriers. The handle features openings to permit fluid flow therethrough and bifurcated portions extending between the handle and side portions of the floor to lend stiffness to the platform.