The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 1993
Filed:
Mar. 23, 1992
Applicant:
Inventors:
Shunsaku Kodama, Shiga, JP;
Yasumasa Shima, Shiga, JP;
Shigeru Kohara, Shiga, JP;
Yasuhiko Ohashi, Shiga, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B65G / ;
U.S. Cl.
CPC ...
414416 ; 414222 ; 414331 ; 414786 ; 414938 ;
Abstract
A method of taking out and transferring a plurality of wafers from each of a plurality of wafer carriers to a wafer conveyor robot includes the steps of taking out wafer groups inside the wafer carriers from respective wafer carriers and aligning the same on a straight line with respective wafer groups being spaced apart, shifting at least one of the wafer groups so that an interval between the spaced wafer groups becomes equal to intervals among the wafers in each of wafer groups, and holding the shifted wafer groups with the wafer conveyor robot. An apparatus for practicing this method is also disclosed.