The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 1993
Filed:
Jul. 30, 1992
William W Dostalik, Richardson, TX (US);
Lee M Loewenstein, Plano, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
In one embodiment this is a method of clamping semiconductor wafers for processing with the active face down. The method comprises: supporting a face down wafer 10 on an intermediate support 15; placing a clamping surface 14 at least adjacent to a backside of the wafer; moving at least three bevel-edged pins 11 upward to engage the beveled edges 12 with portions of the periphery of the face to press the wafer 10 against the clamping surface 14; moving the intermediate support 15 away from the wafer 10, and removing photoresist from the wafer by ashing the photoresist, whereby photoresist is essentially completely removed and essentially no unremoved photoresist remains to contaminate later processing.