The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 1993
Filed:
Nov. 12, 1992
Applicant:
Inventor:
Yasuhiko Iwamoto, Tokyo, JP;
Assignee:
NEC Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437183 ; 437192 ; 437230 ; 437235 ; 437190 ; 427 98 ;
Abstract
An oxidizable metal film and a barrier metal film are formed in the named order on an insulating film formed on a semiconductor substrate or in a contact hole formed through the insulating film. A gold film is selectively formed on the barrier metal film in alignment with the contact hole. The barrier metal is selectively removed using the gold film as a mask, and an exposed surface of the oxidizable metal film is oxidized. A second metal film is deposited on only a surface of the gold film by an electroplating using the oxidized surface of the oxidizable metal film as an anti-plating mask. Finally, the oxidizable metal film not covered by the gold film is completely oxidized.