The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 1993
Filed:
Dec. 21, 1992
Hsiao-Chin Tuan, Hsin-Chu, TW;
Hsiang-Ming J Chou, Hsin-Chu, TW;
Industrial Technology Research Institute, Hsincho, TW;
Abstract
A new method to produce a microminiturized capacitor having a roughened surface electrode is achieved. The method involves depositing a first polycrystalline or amorphous silicon layer over a suitable insulating base. The silicon layer is either in situ heavily, uniformly doped or deposited undoped and thereafter heavily doped by ion implantation followed by heating. The structure is annealed at above about 875.degree. C. to render any amorphous silicon polycrystalline and to adjust the crystal grain size of the layer. The polysilicon surface is no subjected to a solution of phosphoric acid at a temperature of above about 140.degree. C. to partially etch the surface and cause the uniformly roughened surface. A capacitor dielectric layer is deposited thereover. The capacitor structure is completed by depositing a second thin polycrystalline silicon layer over the capacitor dielectric layer.