The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 1993
Filed:
Aug. 11, 1992
Applicant:
Inventors:
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
G01K / ; G01D / ;
U.S. Cl.
CPC ...
374-1 ; 2502521 ; 3241 / ;
Abstract
A device and method for calibrating at least one temperature sensor is disclosed herein. A wafer (30) is provided having a first plurality of calibration islands (36) of a material having a melting point in the range 150.degree.-1150.degree. C. The effective reflectivity of the wafer is measured in operation using the temperature sensor or via a separate light source. A first step change in an output signal of the temperature sensor corresponding to a wafer temperature equal to the melting point of the first calibration islands is detected. Finally, the temperature sensor calibration parameters are calculated.