The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 1993
Filed:
Sep. 24, 1991
Bernhard Schoenherr, Offenbach, DE;
Leybold Aktiengesellschaft, Hanau I, DE;
Abstract
In a row evaporator for vacuum vapor depositing apparatus, having a plurality of conductively heated evaporator cells (5, 5', . . . ) disposed in the process chamber (11) and individually controllable in output, and connected to jaw-like electrical contacts (3, 3', . . . ; 4, 4', . . . ), the jaw-like contacts are held by an electrically conductive supporting body (6) extending over the entire length of the row evaporator, while the contacts (3, 3', . . . ) of the one polarity are electrically connected to the supporting body (6), and the contacts (4, 4', . . . ) of the other polarity are subject to the action of a plunger (9, 9', . . . ) which is configured as a cylindrical bolt and is brought outwardly through the wall (10) of the process chamber so as to be vacuum-tight yet longitudinally displaceable, so that the cross-sectional area of this plunger (9, 9', . . . ) remains exposed to atmospheric pressure during the operation of the apparatus, and then presses the contacts or jaws (4, 4', . . . ) against their individual evaporator cells (5, 5', . . . ) with sufficiently measured force.