The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 1993
Filed:
Sep. 19, 1991
Steven Magdo, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A corner test structure for multi-layer thin-film modules. In the corner of each layer a test structure is formed as part of the process for forming the layer itself. This corner test structure is designed to emulate the wiring pattern of the layer itself in terms of density and pattern. Each test site also includes vias for forming, in combination with vias from preceding and succeeding layers, via chain which emulate the via chains extending through the active wiring region of the module itself. Each test site structure includes a large array of test pads only a few of which are used at any given layer. The entire test pad array of each level is connected by vias to the test pattern on adjoining levels so that a test structure pattern at a given layer may be accessed from pads at each succeeding level and from pads on the upper surface of the completed module.