The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 1993
Filed:
May. 26, 1992
Mitsubishi Jukogyo Kabushiki Kaisha, Tokyo, JP;
Agency of Industrial Science and Technology, Tokyo, JP;
Abstract
A positioning control method and apparatus in which a fine movement mechanism is moved without exceeding a movable area so that positioning of a large amount of displacement can be attained with high accuracy and high-speed positioning from a point to a point with the same control method. A coarse movement mechanism (101) has a large amount of movement and low positioning accuracy and a fine movement mechanism (102) on the coarse movement mechanism has a small amount of movement and high positioning accuracy. A signal E4 based on a error signal C4 of a movement command signal A4 of a signal generator (104) and a displacement signal B4 representative of a displacement of an object to be positioned with respect to a fixed position detected by an absolute position detecting device (105) is supplied to the fine movement mechanism and a coarse movement command signal M4, produced by adding a signal representative of a relative displacement of the fine movement mechanism (102) with respect to the coarse movement mechanism (101) detected by a relative position detecting device (133) to the error signal C4, is supplied to the coarse movement mechanism (101) to thereby control respective movements.