The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 09, 1993

Filed:

Sep. 08, 1992
Applicant:
Inventors:

Hirohito Itoh, Machida, JP;

Shinji Ohishi, Oyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
2504922 ; 25044211 ; 25045311 ; 378 34 ; 378208 ;
Abstract

A movable stage device, which has a stationary base, a movable stage and a linear motor, further includes a second linear motor which serves as a second driving device for imparting thrust to the movable stage and which is attached to the movable stage through the intermediation of an attachment plate Both ends of a row of second drive coils are supported above the floor by support plates, which are independent of the stationary base and directly support the row of second drive coils above the floor in such a manner as to provide high rigidity, thereby attaining an improvement in speed and accuracy of positioning and avoiding a waste of energy.


Find Patent Forward Citations

Itoh, Hirohito. (1993). Stage device for an exposure apparatus and semiconductor device (U.S. Patent No. 5260580). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5260580

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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