The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 1993
Filed:
Aug. 13, 1992
Daniel R Marshall, Tucson, AZ (US);
WYKO Corporation, Tucson, AZ (US);
Abstract
A scanning probe microscope achieves increased resolution and speed in profiling a surface of a sample by producing an error signal representing a difference between a probe signal and a desired value of the probe signal. The error signal is compensated for delay in response of a position translator. The position translator moves in response to the compensated error signal to produce a change in the probe signal dependent upon how closely the probe moves along the sample surface. A signal representing height of the sample surface is produced by filtering and scaling the probe signal and summing the resulting signal with the compensated error signal. Both high frequency components of the probe signal and low frequency components of the compensated error signal are included in the sample surface height-representing signal, resulting in very high image resolution without sacrificing scanning speed.