The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 1993
Filed:
Mar. 09, 1992
Applicant:
Inventors:
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
219390 ; 392418 ; 414939 ; 118729 ;
Abstract
An antonomous container permits the vacuum transportation of any random small object and the performance of operations within a container (1) or lock (2), without it being necessary to transfer the object (10) into a working station (3). The container according to the invention is small and is provided with shielding windows (12). Therefore the object (10) can be observed within the container (1) during the operations performed within the said container (1). The latter can be transferred for supplementary operations with respect to the object (10) to the working station (3) by means of a manipulating rod (30). Application to the growth of integrated circuits in microelectronics.