The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 1993
Filed:
Mar. 24, 1992
Applicant:
Inventors:
Ludwig Pohl, Darmstadt, DE;
Herbert Schumann, Berlin, DE;
Wilfried Wassermann, Berlin, DE;
Uwe Hartmann, Berlin, DE;
Thomas Seuss, Berlin, DE;
Assignee:
Merck Patent Gesellschaft Beschrankter Haftung, Darmstadt, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C36B / ;
U.S. Cl.
CPC ...
156600 ; 156610 ; 156622 ; 156624 ; 156D / ; 156D / ;
Abstract
The invention relates to organometallic compounds of the elements aluminum, gallium and indium which are two-fold intramolecularly stabilized, and to the use thereof for the production of thin films and epitaxial layers by deposition from the liquid or solid phase.