The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 1993
Filed:
Mar. 19, 1991
ITT Corporation, New York, NY (US);
Abstract
A method for sensitive and precise determination of the temperature of a thin layer or wafer of bandgap material, without requiring contact to the layer or to the wafer, is based on selection of optical wavelength or wavelengths and the measurements of transmittance through the sample at such wavelength(s). The relationship between the temperature variations of the absorption coefficient, whether determined by band-to-band absorption or a totally different mechanism, and the measured transmittance, provide an indication of the sample temperature, without regard to the ambient temperature. The method prescribes how to select the wavelength(s) based both on the intrinsic properties of the material and on the practical considerations of the measurement situation.