The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 1993
Filed:
Apr. 23, 1992
Applicant:
Inventor:
Takashi Kurokawa, Yokohama, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118719 ; 118 64 ; 118 58 ; 118 66 ; 118 72 ; 118724 ; 118725 ; 118 50 ;
Abstract
A process for producing a photoconductive member by introducing starting gases while heating a support to form a thin film having photoconductivity thereon in sequential steps comprises introducing a support into a chamber, heating the support to a desired temperature under reduced pressure, reacting the substrate with starting gases to form a thin film having photoconductivity thereon, cooling the substrate having a thin film and removing product support out of the chamber, these steps being carried out in sequential chamber throughout the steps, and an apparatus for producing the same.