The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 1993
Filed:
Feb. 10, 1992
Applicant:
Inventor:
William E Hughes, Annandale, VA (US);
Assignee:
Commonwealth Scientific Corporation, Alexandria, VA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H / ; H05H / ; H01J / ;
U.S. Cl.
CPC ...
313 30 ; 313 32 ; 313 33 ; 31323141 ; 3133601 ; 3133621 ;
Abstract
A cooled plasma source for producing ions by electrical discharge. A cooled plate is positioned in the chamber of the plasma source for blocking thermal radiation from an electron-emitting cathode. The presence of the cooled plate results in significantly decreased substrate temperatures, as compared to use of conventional plasma source apparatus. As a result, the cooled plasma source may be used for treatment of heat-sensitive plastic substrates.