The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 1993
Filed:
Jan. 07, 1992
Applicant:
Inventors:
Jerome J Schmitt, III, New Haven, CT (US);
Bret L Halpern, Bethany, CT (US);
Assignee:
Jet Process Corporation, New Haven, CT (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ;
U.S. Cl.
CPC ...
118723 ; 118718 ; 118725 ; 118729 ; 118730 ; 31511121 ;
Abstract
An apparatus for fabricating thin film materials utilizing high speed gas dynamics relies on supersonic free jets of carrier gas to transport depositing vapor species generated in a microwave discharge to the surface of a prepared substrate where the vapor deposits to form a thin film. The present invention generates high rates of deposition and thin films of unforeseen high quality at low temperatures.
Schmitt, III, Jerome. (1993). Microwave plasma assisted supersonic gas jet deposition of thin film (U.S. Patent No. 5256205). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5256205
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile