The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 1993
Filed:
Apr. 06, 1992
Hiroshi Takagi, Hyogo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A circuit test of a semiconductor device having a redundant circuit for repairing defective circuit is carried with the fuse portion (21) of the redundant circuit and the bonding pad portion (26) exposed and the wiring layers (23) formed on the semiconductor substrate protected with a first protective layer (32). By this step, metal shavings (29) scraped from the surface of the bonding pad by a tester electrode terminal during the circuit test can be prevented from being directly in contact with the interconnection layers, whereby generation of short circuit can be prevented. Thereafter, the surfaces of the bonding pad portion and the fuse portion are covered with a second protective layer (33) and a third protective layer (25) (polyimide). The surface of the bonding pad portion is exposed by etching. By forming the polyimide film on the bonding pad with the second protective layer interposed therebetween, the alkali solution for etching the polyimide film can be prevented from making rough the surface of the bonding pad.