The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 1993
Filed:
Jan. 13, 1992
Applicant:
Inventors:
Osamu Watanabe, Yokohama, JP;
Motoyuki Yamada, Kawasaki, JP;
Fujio Yagihashi, Yokohama, JP;
Minoru Takamizawa, Tokyo, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08F / ;
U.S. Cl.
CPC ...
526279 ;
Abstract
A p-vinylphenoxydimethylphenylcalbyldimethylsilane homopolymer having a molecular weight dispersion narrow enough to ensure high resolution and high developability to resists containing said homopolymer as main component can be manufactured by anionic polymerization of a p-vinylphenoxydimethylphenylcalbyldimethylsilane monomer.