The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 1993
Filed:
Apr. 23, 1992
Applicant:
Inventors:
Kazufumi Ogawa, Hirakata, JP;
Masayuki Endo, Izumi, JP;
Keiji Ohno, Sakado, JP;
Mamoru Nagoya, Saitama, JP;
Assignees:
Wako Pure Chemical Industries, Ltd., Osaka, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07C / ; G03F / ;
U.S. Cl.
CPC ...
534557 ; 534556 ; 430189 ; 430192 ; 430193 ;
Abstract
Photosensitive compounds having preferably a functional group such as --SO.sub.2 Cl, --SO.sub.3 H, --SO.sub.3 R, ##STR1## (R, R', R' being alkyl) on a terminal benzene or naphthalene ring connected via a methylene group and ##STR2## moiety are improved in sensitivity to light and thermal stability, and thus useful in a photo resist.