The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 1993
Filed:
Mar. 13, 1991
Applicant:
Inventors:
Shinji Yagawara, Yokohama, JP;
Wasaburo Ohta, Yokohama, JP;
Assignee:
Ricoh Company, Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
204431 ; 73 3106 ; 338 34 ; 422 98 ;
Abstract
A gas sensor includes a substrate, a heater member formed on the base member, a gas sensitive structure formed on the heater member by a process comprising the following steps of forming a stacked layer structure on the heater member, the stacked layer structure including at least a metal-oxide semiconductor layer and an insulating film, and carrying out a heat treatment with respect to the stacked layer structure so that a constituent of the insulating film is diffused in spaces among crystal particles of the metal-oxide semiconductor layer, and electrode layers are in contact with the gas sensitive structure.