The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 21, 1993

Filed:

Jan. 23, 1992
Applicant:
Inventor:

Peter G Borden, San Mateo, CA (US);

Assignee:

High Yield Technology, Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ; G01N / ;
U.S. Cl.
CPC ...
250574 ; 356338 ;
Abstract

A converging funnel is placed in an exhaust line to direct substantially all the gas flow in the exhaust line to the sensing laser beam of a particle sensor, thereby preventing deposition of species carried by the gas from depositing on the particle sensor. By concentrating substantially all gas flow through the laser beam, the particle count rate is increased because substantially all particles carried by the exhaust gas is channeled through the laser beam. Further, the particle sensor is also prevented from adverse heating effects of the exhaust gas. In one embodiment, the converging funnel is mounted to the interior wall of the exhaust line by a centering ring.


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