The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 07, 1993

Filed:

May. 18, 1992
Applicant:
Inventors:

Bjoern Elvers, Hainburg, DE;

Klemens Ruebsam, Jossgrund, DE;

Jochen Heinz, Linden, DE;

Georg Harwarth, Alzenau, DE;

Ulrich Reibold, Wilhelmsfeld, DE;

Norbert Ross, Maintal, DE;

Helmut Grimm, Darmstadt, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118718 ; 118726 ; 4272555 ;
Abstract

An apparatus for the continuous coating of band-type substrates in a vacuum chamber comprises a plurality of evaporation vessels 1, 1', . . . of the same size and configuration. These vessels form a row of evaporation vessels aligned with the direction of movement of the band and are spaced approximately equally apart. All vessels are made of an electrically conductive, ceramic material and can be heated by directly passing a current. Provision is made for a device for the continuous supply of wire to be evaporated to the evaporator vessels. The individual evaporator vessels 1, 1', . . . of the row are offset with respect to one another. Together, they cover a small coating zone B which extends transversely to the direction of movement A of the band.


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