The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 1993
Filed:
Mar. 19, 1991
Applicant:
Inventors:
R Scot Clark, Fallbrook, CA (US);
Stephen S Baird, Vista, CA (US);
Joe G Hoffman, Cardiff-By-The-Sea, CA (US);
Assignee:
Startec Ventures, Inc., Fallbrook, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B / ; H01L / ;
U.S. Cl.
CPC ...
29 2501 ; 1341022 ; 134902 ;
Abstract
Semiconductor wafers and other electronic parts which similarly require ultra-high purity manufacturing environments are treated with ultra-high purity liquid cleaning and etching agents prepared at the site of use from gaseous raw materials which have been purified to a level compatible with semiconductor manufacturing standards, combined when appropriate with ultra-pure water.