The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 1993
Filed:
Oct. 01, 1990
John R McNeil, Albuquerque, NM (US);
Scott R Wilson, Albuquerque, NM (US);
Other;
Abstract
An optical scatterometer system includes a screen positioned to receive and display a pattern representative of light specularly reflected and scattered from an illuminated sample material and a camera positioned to record the pattern displayed on the screen. The screen may present a curved surface to increase its light gathering capabilities and may be constructed of an electron trapping material, a photochromic material or a pyrochromic material. The screen may contain one or more apertures for passing one or more incident light beams generated by a light source and/or light specularly reflected and scattered from the sample material. The screen may be positioned between the sample material and the light source, or the sample material may be positioned between the screen and the light source.