The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 1993
Filed:
Oct. 26, 1992
Ching-Hsong Wu, Farmington Hills, MI (US);
Timothy J Potter, Dearborn, MI (US);
Michael A Tamor, Toledo, OH (US);
Ford Motor Company, Dearborn, MI (US);
Abstract
Provided is a method and apparatus for in-situ measuring filament temperature and the thickness of a film deposited on a substrate disposed within a hot-filament chemical vapor deposition reactor. In accordance with the invention, white light which is emitted directly from the filament and that reflects from the top and bottom surfaces of a deposited film are collected and converted to monochromatic light through the use of simple narrow-banned interference filters operative over specific, yet different, optical banned widths. This information is thereafter used to mathematically calculate the filament temperature, film thickness and growth rate of the deposited film.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile