The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 24, 1993

Filed:

Jun. 25, 1992
Applicant:
Inventors:

Taira Matsunaga, Kawasaki, JP;

Bunshiro Yamaki, Fujisawa, JP;

Assignee:

Kabushiki Kaisha Toshiba, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437 40 ; 437 20 ; 437 63 ; 437162 ; 437192 ; 437193 ; 437233 ; 437235 ; 437248 ; 257378 ; 257382 ;
Abstract

A Bi-MOS type semiconductor integrated circuit device having at least one bipolar transistor in an island region is provided. The island region is covered with a multilayer insulating film which is formed of a silicon oxide film and a silicon nitride film having a different etching resistance with each other. Collector and base contact holes and an intended emitter contact hole are formed in the multilayer insulating film at the same time to provide bipolar transistors having a fine structure. An insulated gate MOS transistor includes a protective film such as polysilicon film covering a gate insulating film to increase the reliability.


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