The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 1993
Filed:
Aug. 13, 1992
Applicant:
Inventors:
Werner Hickel, Mannheim, DE;
Wolfgang Knoll, Mainz, DE;
Assignee:
BASF Aktiengesellschaft, Ludwigshafen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ; G01N / ;
U.S. Cl.
CPC ...
356381 ; 356445 ;
Abstract
The refractive index and thickness of ultrathin layers<1 .mu.m in thickness are determined by recording the layers, which have been applied to a solid support, by surface plasmon microscopy as a function of the angle of incidence of the incident laser beam, the method making it possible to determine layer thicknesses with a vertical resolution.gtoreq.0.1 nm and a simultaneous lateral resolution.gtoreq.5 .mu.m.