The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 1993
Filed:
Jun. 21, 1991
Dainippon Screen Mgf. Co., Ltd., Kyoto, JP;
Abstract
A spin coating apparatus for use in applying a coating solution in film form to an upper surface of a substrate. This apparatus includes a rotary table for spinning the substrate as supported thereon in horizontal posture, the rotary table having a size larger than an outline contour of the substrate, and an upper rotary plate disposed parallel to and slightly spaced from the upper surface of the substrate supported on the rotary table. The rotary table and upper rotary plate define a flat treating space therebetween, which treating space has peripheral openings for allowing superfluous part of the coating solution to scatter outwardly therefrom. A nozzle plate is disposed between the rotary table and the substrate supported thereon. The nozzle plate receives cleaning liquid supplied through a rotary shaft of the rotary table, and directs the liquid to the lower surface of the substrate.