The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1993
Filed:
Dec. 23, 1991
Applicant:
Inventors:
Subhendu Guha, Troy, MI (US);
Arindam Banerjee, Madison Heights, MI (US);
Chi C Yang, Troy, MI (US);
XiXiang Xu, Troy, MI (US);
Assignee:
United Solar Systems Corporation, Troy, MI (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
437113 ; 437101 ; 437225 ; 437228 ; 437233 ; 427575 ; 427570 ; 118723 ;
Abstract
The glow discharge deposition of thin film materials is most advantageously carried out at a pressure which is less than the pressure of the minimum point on the deposition system's Paschen curve and at a power which is in excess of the minimum power required to sustain a deposition plasma at the particular process pressure.