The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 1993
Filed:
Sep. 12, 1991
Applicant:
Inventor:
Hideo Hara, Kanagawa, JP;
Assignee:
Hoya Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21G / ; H01J / ;
U.S. Cl.
CPC ...
2504931 ; 2504921 ; 313639 ;
Abstract
In an exposure light source for use in exposing a pattern onto a substrate, an exposure lamp substantially encloses only a single isotope of a specific metal. The single isotope emits far ultraviolet light which has a very narrow bandwidth when vaporized and excited in the exposure lamp. Preferably, the single isotope may have a nuclear spin equal to zero and is effective to make the bandwidth of the far ultraviolet light narrower. The single isotope may be determined in consideration of an abundance ratio of each isotope. The specific metal may be selected from a group consisting of mercury, lead, zinc, and cadmium.